Tokkyokiki Corporation (Japan)
Products: Active Microvibration Isolation
Microvibration control technology is a vibration reduction and shielding technology used to insulate precision instruments, such as semi-conductor production equipments and measuring instruments, and the other vibration-sensitive equipments like electron microscope from the vibration of direct disturbance and ground disturbance.
Features
Compact device with sensor and driver included in which air actuators of superior features in frequency response.
Capable of realizing the three functions of vibration insulation, direct disturbance suppression and position reverting simultaneously.
The actuator with big stroke has excellent features of controlling position and gesture easily while insulating microvibration at the same time.
Products: Active Mignetic Field Canceller
Protects Electron Beam application equipment from environmental magnetic interferences High performance Active Magnetic Field Canceller AMC-330
Active Magnetic Field Canceller AMC-330
Applications
Scanning ElectronMicroscope(SEM)
Transmission Electron Microscope(TEM)
Focused Ion Beam (FIB)
Mass Spectrometer (MASS)
Electron Beam Lithography (EBL)
Mask Inspection Equipment
Wafer Inspection System ■ High Performance
Features
High damping performance of maximum 40～60ｄB
Low Cost
Cost of 1/10 against passive shield solution
Easy Installation
Easy installation just for arrangement ofcoils around the equipment to be protected
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[ <EMI Canceller> EMI; Electro Magnetic Interference ]
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