RENA Technologies GmbH (Germany)
Products
Evolution
Revolution
SAT
Application
Process technologies for Silicon IC, MEMS & Sensors, µLED, RF & Power
Wet processes for surface treatment such as etching, cleaning and stripping
for 100 mm up to 200 mm wafer sizes
Features
Evolution* – High throughput immersion wet processing
- Full-Auto, dry-to-dry operation
- 25, 50 and 100 wafer lots, simultaneous lots operation
- Modular design for customized applications
- Class 1 mini-environment
Revolution* - Highly flexible semi-automated wet bench
- Multi-Step wet processing, 2-5 process tanks
- Central robot
- Small footprint
SAT* - Spray Acid Tool for cleaning and etching
- Reduced medium consumption
- Optimized footprint
- Single or dual cassette handling
* All Products:
- SECS/GEM interface options
- Flexible and upgradable
- Stainless-steel version for solvent applications
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[ Evolution ] -
[ Revolution ] -
[ SAT ]
Website
www.rena.com/en/products/semiconductor