Verity Instrument, Inc. (USA)
Products
End point detection for Etch, CMP and PR strip
Application
End point detection~ etch, ash, CVD etchback
Fault detection & classification
CVD film thickness
plasma diagnostics
Process development
CMP endpoint
In-line run to run
PVD film thickness
In-situ & real-time
With or without plasma
Features
Optical emission spectrograph
- Reflectometer, low cost bandpass filter
- High resolution nanochromator
- Providing advance algorithms such as neural PCA
Neural Net, threshold and parallel sequences
- Trend line communication with process tool
- CH-2-CH matching capability
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[ SD1024G ] -
[ Spectral Reflectometer SP2100 ]
Website