PVA TePla America, Inc. (USA)
Products
Plasma Treatment System
Applications
Removal of organic & inorganic contamination
Adhesion promotion
Passivation
Functional bio-coatings
Anti-biofouling
Sterilization
Decontamination for bio-molecular debris
Ophthalmics
Wafer descum
Barrier coatings for chemically resistant or scratch resistant coatings
Features
IoN Series (RF)
RF of 13.56 MHz is applied via electrode into the vacuum chamber to allow physical surface treatment via ion bombardment.
IoN Wave Series (MW)
Low-cost, mid-sized wafer batch asher is loaded with advanced features and targets the needs of small scale foundries, universities, and star-up companies.
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