Revasum, Inc. (USA)
Products: 6EZ Polisher for SiC wafer
The First Fully Automated Single Wafer Polisher for SiC
Features
3 sequential polish tables for process flexibility with maximum throughput
Fully automated, single side or sequential two-sided polish
50 wafer two-sided processing without operator intervention
Integrated cleaner for dry-in/dry-out
Advanced controls and Windows-based operating system
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[ 6EZ Single Wafer Polisher ]
Overview
Polish section consists of three polish tables
Dedicated spindle for each polish table
Pad conditioner and high-pressure spray bar ,for the best possible wafer-to-wafer process control
Each polish section has an integrating wet wafer transfer station to rinse wafers between tables
In addition, all tables can be configured with up to three slurries (optional)
Separate post-polish wafer cleaning module
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[ 6EZ: 3 Polish Tables ]
Website