Infinitesima Limited (United Kingdom)
Metron3D Rapid Probe Microscopy
New Concept 3D Imaging of Critical Semiconductor Structures
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[ Metron3D Automated In – Line Probe Metrology System ]
Features
All - axis interferometer probe control for unprecedented X, Y and Z spatial resolution
Ultra – low probe interaction force for long probe lifetime and no wafer damage
100 micron Field of View, stitchable to even larger areas
Up to 100 times faster than conventional AFM
High - capacity probe library and automatic probe exchange
Fully automated operation and data analysis
300 mm capable and HVM semiconductor fab ready
Application Examples
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[ EUV Resist Imaging ] -
[ CMP Profiles and Surface Roughness ] -
[ Logic FEOL High Aspect Ratio Structures ]
Website